The study on the preparation of ITO powder by spray pyrolysis

This experiment was conducted with the raw materials of InCl₃·4H₂O and SnCl₂·2H₂O, the solvent of water and the mixture of them as precursor solution. And the ITO powders were prepared with the joint method of micro-wave and ultrasonic wave spray pyrolysis in a tubular furnace heated by micro-wave. The influence of different micro-wave pyrolysis temperature and adding the surface active agent of ethanol on the change of microstructure has been analyzed. And the structural characteristics and microstructure of the product have been characterized with the help of TG-DSC, EDS, XRD, SEM and TEM. The results demonstrated that appropriate precursor solution concentration, temperature and proper quantity of additive are the key factors that have effect on the morphology of ITO powders. The extraordinarily fine ITO particles which have relatively small diameter, good dispersibility property and spherical shape morphology were prepared when the temperature was 650℃, concentration was 0.01 mol/L, the quantity of alcohol added was 30% and the a 200 mesh strainer was inserted.