Abstract
Filtered cathode vacuum arc deposition can remove the macroparticles produced from the cathode. Positively biasing the whole filter or inserting a biased plate in the filter can increase the plasma transport efficiency. We developed a curved magnetic filter with rectangular cross-section to improve the coating efficiency. In this study, the effect of biased plates at outer-wall and inner-wall on the transport efficiency of vacuum arc plasma through rectangular curved magnetic filter was investigated. A Langmuir probe system is used to measure the distribution properties of the filtered plasma at 15 places in the outlet plane of the filter. The results showed that a positively biased plate at inner-wall would increase the output ion current density and make the plasma concentrate to the middle of the outlet plane.
| Original language | English |
|---|---|
| Article number | 1740006 |
| Journal | Modern Physics Letters B |
| Volume | 31 |
| Issue number | 19-21 |
| DOIs | |
| State | Published - 30 Jul 2017 |
Keywords
- Filtered cathode vacuum arc deposition
- biased plate
- ion current density
- plasma distribution
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