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Temperature sensor of high-sensitivity based on nested ring resonator by Vernier effect

  • Chengcai Tian
  • , Hao Zhang
  • , Wenxiu Li
  • , Xin Huang
  • , Jiaming Liu
  • , Anping Huang
  • , Zhisong Xiao*
  • *Corresponding author for this work
  • Beihang University
  • Beijing Academy of Quantum Information Sciences

Research output: Contribution to journalArticlepeer-review

Abstract

A temperature sensor based on nested ring resonator (NRR) by Vernier effect is proposed and theoretically demonstrated with larger sensitivity. This configuration, on a standard silicon-on-insulator (SOI) chip, consists of a single ring resonator acting as the reference, and a NRR acting as the sensor, which can simultaneously achieve higher quality factor (Q) and larger free spectrum range (FSR) compared with single ring. By adjusting parameters of the NRR, the sensitivity of the whole structure can be 10.611 nm/K, two orders of magnitude larger than that of the single NRR.

Original languageEnglish
Article number164118
JournalOptik
Volume204
DOIs
StatePublished - Feb 2020

Keywords

  • Ring resonator
  • Sensitivity
  • Silicon-on-insulator
  • Temperature sensor
  • Vernier effect

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