Temperature compensation of pressure sensor based on the interpolation of splines

The temperature compensation method based on the interpolation of cubic splines was presented. This method was applied for the temperature compensation of the experimental results of calibration of high precision resonant cylinder pressure sensors. The measuring range of the pressure sensor is 0.0133 × 10⁵-3.1989 × 10 Pa and the applied temperature range is-55-+801°C. To make the calibrating process of pressure sensor fast, the principle of reducing the number of calibrating points was presented. The results indicate that the integrated error of the presented method of temperature compensation is 0.0079%, when the number of calibrating points reduces about 2/3. The integrated error is approximately half of the method of temperature compensation based on the radial basis function (RBF) neural network. Thereby the presented method reduces the cost and workload of calibration effectually. The proposed method can provide a valuable theoretical reference for the temperature compensation of the high precision pressure sensors.