Superplastic micro/nano-formability of La₆₀Al₂₀Ni₁₀Co₅Cu₅ amorphous alloy in supercooled liquid state

La₆₀Al₂₀Ni₁₀Co₅Cu₅ amorphous alloy exhibits an obvious glass transition phenomenon and supercooled liquid state over a wide temperature range. The present paper investigates the macroscopic deformation behavior and microscopic deformation behavior. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, new microforging apparatus and V-grooved microdies of (100) Si were fabricated by a silicon process. The V-groove dies are from 200 nm to 2 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micromaterials for micro-electro-mechanical systems (MEMS).