Study on ultrasonic driller for microstructure manufacture

Ultrasonic machining is a novel manufacture method, which is suitable for machining of nonconductive, brittle, hard and infusible material. In this article, precision four terminal network method and finite element method (FEM) are applied to design ultrasonic tool for machining microstructure. Experiments were done to test this ultrasonic tool and verified the FEA results. Drilling experiments are also done to test the performance of this ultrasonic driller.