Study on micro-mirror macro model and its dynamic behavior

Jingming Song; Yu Ruan; Jinhui Zhai

doi:10.1078/0030-4026-00569

Study on micro-mirror macro model and its dynamic behavior

Jingming Song^*
, Yu Ruan
, Jinhui Zhai

^*Corresponding author for this work

Huazhong University of Science and Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Research on modeling electrostatic micro actuator is essential for the effective control of its action. In this paper, a kind of modeling way is presented for conventional tilting reflecting micro mirror. A polynomial algebraic equation for angel of a tilting 2 orders torque system is introduced and the characters of the model are estimated precisely. Simulation and experiment are implemented for proving the method. Finally, PID control algorithm is exerted hence based on the model and the dynamic response feature is promoted.

Original language	English
Pages (from-to)	569-573
Number of pages	5
Journal	Optik
Volume	115
Issue number	12
DOIs	https://doi.org/10.1078/0030-4026-00569
State	Published - 2004
Externally published	Yes

Keywords

MEMS
Macro model
Micro actuator

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10.1078/0030-4026-00569

Cite this

@article{076b332f04144e24a678a3a8a662de6f,

title = "Study on micro-mirror macro model and its dynamic behavior",

abstract = "Research on modeling electrostatic micro actuator is essential for the effective control of its action. In this paper, a kind of modeling way is presented for conventional tilting reflecting micro mirror. A polynomial algebraic equation for angel of a tilting 2 orders torque system is introduced and the characters of the model are estimated precisely. Simulation and experiment are implemented for proving the method. Finally, PID control algorithm is exerted hence based on the model and the dynamic response feature is promoted.",

keywords = "MEMS, Macro model, Micro actuator",

author = "Jingming Song and Yu Ruan and Jinhui Zhai",

year = "2004",

doi = "10.1078/0030-4026-00569",

language = "英语",

volume = "115",

pages = "569--573",

journal = "Optik",

issn = "0030-4026",

publisher = "Elsevier GmbH",

number = "12",

}

TY - JOUR

T1 - Study on micro-mirror macro model and its dynamic behavior

AU - Song, Jingming

AU - Ruan, Yu

AU - Zhai, Jinhui

PY - 2004

Y1 - 2004

N2 - Research on modeling electrostatic micro actuator is essential for the effective control of its action. In this paper, a kind of modeling way is presented for conventional tilting reflecting micro mirror. A polynomial algebraic equation for angel of a tilting 2 orders torque system is introduced and the characters of the model are estimated precisely. Simulation and experiment are implemented for proving the method. Finally, PID control algorithm is exerted hence based on the model and the dynamic response feature is promoted.

AB - Research on modeling electrostatic micro actuator is essential for the effective control of its action. In this paper, a kind of modeling way is presented for conventional tilting reflecting micro mirror. A polynomial algebraic equation for angel of a tilting 2 orders torque system is introduced and the characters of the model are estimated precisely. Simulation and experiment are implemented for proving the method. Finally, PID control algorithm is exerted hence based on the model and the dynamic response feature is promoted.

KW - MEMS

KW - Macro model

KW - Micro actuator

UR - https://www.scopus.com/pages/publications/11344259840

U2 - 10.1078/0030-4026-00569

DO - 10.1078/0030-4026-00569

M3 - 文章

AN - SCOPUS:11344259840

SN - 0030-4026

VL - 115

SP - 569

EP - 573

JO - Optik

JF - Optik

IS - 12

ER -

Study on micro-mirror macro model and its dynamic behavior

Abstract

Keywords

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