Study on electrical and optical properties of flexible transparent conductive ITO film

Yi Sun; Xungang Diao; Meng Yang; Zhe Wu; Yuanjie Shu

Study on electrical and optical properties of flexible transparent conductive ITO film

Yi Sun^*
, Xungang Diao
, Meng Yang
, Zhe Wu
, Yuanjie Shu

^*Corresponding author for this work

Beihang University
China Academy of Engineering Physics

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 Ω/□ and 85.6%, respectively.

Original language	English
Pages (from-to)	86-90
Number of pages	5
Journal	Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Volume	36
Issue number	1
State	Published - Jan 2007

Keywords

DC magnetron sputtering
Flexible substrate
ITO transparent conductive thin film

Cite this

@article{d7b6c93391f04a88896f6845a2f29aa5,

title = "Study on electrical and optical properties of flexible transparent conductive ITO film",

abstract = "Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 Ω/□ and 85.6\%, respectively.",

keywords = "DC magnetron sputtering, Flexible substrate, ITO transparent conductive thin film",

author = "Yi Sun and Xungang Diao and Meng Yang and Zhe Wu and Yuanjie Shu",

year = "2007",

month = jan,

language = "英语",

volume = "36",

pages = "86--90",

journal = "Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering",

issn = "1002-185X",

publisher = "Science Press ",

number = "1",

}

TY - JOUR

T1 - Study on electrical and optical properties of flexible transparent conductive ITO film

AU - Sun, Yi

AU - Diao, Xungang

AU - Yang, Meng

AU - Wu, Zhe

AU - Shu, Yuanjie

PY - 2007/1

Y1 - 2007/1

N2 - Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 Ω/□ and 85.6%, respectively.

AB - Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 Ω/□ and 85.6%, respectively.

KW - DC magnetron sputtering

KW - Flexible substrate

KW - ITO transparent conductive thin film

UR - https://www.scopus.com/pages/publications/34147160364

M3 - 文章

AN - SCOPUS:34147160364

SN - 1002-185X

VL - 36

SP - 86

EP - 90

JO - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

JF - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

IS - 1

ER -

Study on electrical and optical properties of flexible transparent conductive ITO film

Abstract

Keywords

Other files and links

Fingerprint

Cite this