Study on a MEMS fatigue testing device based on the resonance principle

Lei Ding; Deguang Shang; Dacheng Zhang; Tong Shen; Guanhua Jia; Chuliang Yan

Study on a MEMS fatigue testing device based on the resonance principle

Lei Ding^*
, Deguang Shang
, Dacheng Zhang
, Tong Shen
, Guanhua Jia
, Chuliang Yan

^*Corresponding author for this work

Beijing University of Technology
Peking University

Research output: Contribution to journal › Article › peer-review

Abstract

A novel MEMS(micro-electro-mechanical system) fatigue testing device based on the electrostatic force by comb driver is proposed, which can be fabricated by means of the typical surface micromachining technology. The capacitance and the electrostatic force are analyzed theoretically for the proposed arc-shaped comb driver. The vibrating process of device is simulated utilizing the electromechanical coupled-field element by ANSYS. The simulation results show a good correction with the theoretical prediction. The results indicated that the stress of sample can achieve the required level for MEMS fatigue testing under AC voltage. In addition, the range of the used AC voltage is also evaluated.

Original language	English
Pages (from-to)	684-689
Number of pages	6
Journal	Jixie Qiangdu/Journal of Mechanical Strength
Volume	28
Issue number	5
State	Published - Oct 2006
Externally published	Yes

Keywords

Comb driver
Electromechanical coupled-field analysis
Fatigue
Finite element method
Micro-electro-mechanical system(MEMS)

Cite this

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title = "Study on a MEMS fatigue testing device based on the resonance principle",

abstract = "A novel MEMS(micro-electro-mechanical system) fatigue testing device based on the electrostatic force by comb driver is proposed, which can be fabricated by means of the typical surface micromachining technology. The capacitance and the electrostatic force are analyzed theoretically for the proposed arc-shaped comb driver. The vibrating process of device is simulated utilizing the electromechanical coupled-field element by ANSYS. The simulation results show a good correction with the theoretical prediction. The results indicated that the stress of sample can achieve the required level for MEMS fatigue testing under AC voltage. In addition, the range of the used AC voltage is also evaluated.",

keywords = "Comb driver, Electromechanical coupled-field analysis, Fatigue, Finite element method, Micro-electro-mechanical system(MEMS)",

author = "Lei Ding and Deguang Shang and Dacheng Zhang and Tong Shen and Guanhua Jia and Chuliang Yan",

year = "2006",

month = oct,

language = "英语",

volume = "28",

pages = "684--689",

journal = "Jixie Qiangdu/Journal of Mechanical Strength",

issn = "1001-9669",

publisher = "Chinese Mechanical Engineering Society",

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TY - JOUR

T1 - Study on a MEMS fatigue testing device based on the resonance principle

AU - Ding, Lei

AU - Shang, Deguang

AU - Zhang, Dacheng

AU - Shen, Tong

AU - Jia, Guanhua

AU - Yan, Chuliang

PY - 2006/10

Y1 - 2006/10

N2 - A novel MEMS(micro-electro-mechanical system) fatigue testing device based on the electrostatic force by comb driver is proposed, which can be fabricated by means of the typical surface micromachining technology. The capacitance and the electrostatic force are analyzed theoretically for the proposed arc-shaped comb driver. The vibrating process of device is simulated utilizing the electromechanical coupled-field element by ANSYS. The simulation results show a good correction with the theoretical prediction. The results indicated that the stress of sample can achieve the required level for MEMS fatigue testing under AC voltage. In addition, the range of the used AC voltage is also evaluated.

AB - A novel MEMS(micro-electro-mechanical system) fatigue testing device based on the electrostatic force by comb driver is proposed, which can be fabricated by means of the typical surface micromachining technology. The capacitance and the electrostatic force are analyzed theoretically for the proposed arc-shaped comb driver. The vibrating process of device is simulated utilizing the electromechanical coupled-field element by ANSYS. The simulation results show a good correction with the theoretical prediction. The results indicated that the stress of sample can achieve the required level for MEMS fatigue testing under AC voltage. In addition, the range of the used AC voltage is also evaluated.

KW - Comb driver

KW - Electromechanical coupled-field analysis

KW - Fatigue

KW - Finite element method

KW - Micro-electro-mechanical system(MEMS)

UR - https://www.scopus.com/pages/publications/33751576811

M3 - 文章

AN - SCOPUS:33751576811

SN - 1001-9669

VL - 28

SP - 684

EP - 689

JO - Jixie Qiangdu/Journal of Mechanical Strength

JF - Jixie Qiangdu/Journal of Mechanical Strength

IS - 5

ER -

Study on a MEMS fatigue testing device based on the resonance principle

Abstract

Keywords

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