Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

Liuhe Li; Haiquan Zhang; Yanhua Zhang; Paul K. Chu; Xiubo Tian; Lifang Xia; Xinxin Ma

doi:10.1016/S0921-5107(02)00079-X

Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

Liuhe Li^*
, Haiquan Zhang
, Yanhua Zhang
, Paul K. Chu
, Xiubo Tian
, Lifang Xia
, Xinxin Ma

^*Corresponding author for this work

School of Mechanical Engineering and Automation

Beihang University
City University of Hong Kong
Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

49 Scopus citations

Abstract

Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp³ structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp³ structures may exhibit similar D Raman peaks.

Original language	English
Pages (from-to)	95-101
Number of pages	7
Journal	Materials Science and Engineering: B
Volume	94
Issue number	1
DOIs	https://doi.org/10.1016/S0921-5107(02)00079-X
State	Published - 15 Jun 2002

Keywords

Diamond-like carbon films
Hardness
Raman spectroscopy
X-ray photoelectron spectroscopy

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10.1016/S0921-5107(02)00079-X

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title = "Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy",

abstract = "Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp3 structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp3 structures may exhibit similar D Raman peaks.",

keywords = "Diamond-like carbon films, Hardness, Raman spectroscopy, X-ray photoelectron spectroscopy",

author = "Liuhe Li and Haiquan Zhang and Yanhua Zhang and Chu, \{Paul K.\} and Xiubo Tian and Lifang Xia and Xinxin Ma",

year = "2002",

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doi = "10.1016/S0921-5107(02)00079-X",

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T1 - Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

AU - Li, Liuhe

AU - Zhang, Haiquan

AU - Zhang, Yanhua

AU - Chu, Paul K.

AU - Tian, Xiubo

AU - Xia, Lifang

AU - Ma, Xinxin

PY - 2002/6/15

Y1 - 2002/6/15

N2 - Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp3 structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp3 structures may exhibit similar D Raman peaks.

AB - Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load-displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp3 structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp3 structures may exhibit similar D Raman peaks.

KW - Diamond-like carbon films

KW - Hardness

KW - Raman spectroscopy

KW - X-ray photoelectron spectroscopy

UR - https://www.scopus.com/pages/publications/0037097015

U2 - 10.1016/S0921-5107(02)00079-X

DO - 10.1016/S0921-5107(02)00079-X

M3 - 文章

AN - SCOPUS:0037097015

SN - 0921-5107

VL - 94

SP - 95

EP - 101

JO - Materials Science and Engineering: B

JF - Materials Science and Engineering: B

IS - 1

ER -

Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

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Keywords

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