Solvent assisted capillary force lithography

  • Xinhong Yu
  • , Zhe Wang
  • , Rubo Xing
  • , Shifang Luan
  • , Yanchun Han*
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Capillary force lithography (CFL) utilizes the capillary-filling phenomenon of a polymeric melt into a cavity to pattern the polymer film coated on a substrate. Most CFL approaches are realized at high temperatures. The solvent-assisted CFL method proposed here realizes patterning at ambient temperature. A swollen PDMS (poly(dimethysilane)) stamp by solvent is placed in contact with a polymer thin film. As the solvent reserved in the PDMS stamp diffuses into the polymer film, the polymer can be dissolved or swollen. Then the capillary force drives the pattern formation. By carefully choosing the experimental conditions, it is possible to produce highly regular and reproducible nano- to micrometer scale polymer patterns using the same microscopic patterned mold. Complex polymer patterns can also be fabricated through the multiple printing.

Original languageEnglish
Pages (from-to)11099-11103
Number of pages5
JournalPolymer
Volume46
Issue number24
DOIs
StatePublished - 21 Nov 2005
Externally publishedYes

Keywords

  • Capillary force lithography
  • Photolithography
  • Polystyrene

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