Abstract
The formation and ordering of Si nanocrystals in dewetting and agglomeration of the thin single crystalline Si layer in silicon-on-insulator has been investigated using low-energy electron microscopy. The evolution of the Si dewetting and agglomeration is captured in real time, revealing the detailed process for the formation and ordering of the nanocrystals. A surface faceting mechanism governing this self-organized process is proposed and supported with first-principles calculations.
| Original language | English |
|---|---|
| Article number | 235413 |
| Journal | Physical Review B - Condensed Matter and Materials Physics |
| Volume | 72 |
| Issue number | 23 |
| DOIs | |
| State | Published - 15 Dec 2005 |
| Externally published | Yes |
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