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Self-consistent field theory of directed self-assembly on chemically- prepatterned surfaces

  • Kenichi Izumi
  • , Nabil Laachi
  • , Xingkun Man
  • , Kris T. Delaney
  • , Glenn H. Fredrickson
  • University of California at Santa Barbara
  • JSR Corporation

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We use self-consistent field theory to investigate the self-assembly of AB diblock copolymers on chemically patterned substrates. The striped substrates consist of attractive domains alternating with neutral ones. Using our simulations, we observe the formation of different self-assembled morphologies in the polymer film and compute their formation free energy for various pattern widths and wetting conditions. We found that perpendicular lamellae are best formed when the A-attractive stripes have a width near half the natural lamellar period in bulk, but lamellar structures with wide bases are also formed in wide stripes. We also computed the formation energy of isolated dislocations and found that the energy cost is ≈ 50-110kT for ±15nm deviations from optimal commensurability conditions.

Original languageEnglish
Title of host publicationAlternative Lithographic Technologies VI
PublisherSPIE
ISBN (Print)9780819499721
DOIs
StatePublished - 2014
Externally publishedYes
EventAlternative Lithographic Technologies VI - San Jose, CA, United States
Duration: 24 Feb 201427 Feb 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9049
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceAlternative Lithographic Technologies VI
Country/TerritoryUnited States
CitySan Jose, CA
Period24/02/1427/02/14

Keywords

  • Chemo-epitaxy
  • Defect energy
  • Directed self-assembly
  • Dislocations
  • Self consistent field theory

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