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Scanning near-field acoustic microscope and its application

  • Beihang University

Research output: Contribution to journalArticlepeer-review

Abstract

Scanning near-field acoustic microscope (SNAM) combines the ultrasonic detection technology with scanning near-field microscopy. The main characteristic of such microscope is that the acoustic wave is produced or detected in near-field area whether ultrasonic transducer acts as generator or detector. The resolution of SNAM can reach to nanometer scale. First, two typical SNAMs, scanning electron acoustic microscope and scanning probe acoustic microscope, will be introduced in this paper. The working principle of our homemade SNAM based on a commercial scanning probe microscope will be reported, together with some recent results from this homemade SNAM.

Original languageEnglish
Pages (from-to)126-130
Number of pages5
JournalScience China Technological Sciences
Volume54
Issue number1
DOIs
StatePublished - Jan 2011

Keywords

  • scanning near-field acoustic microscope
  • scanning probe microscopy
  • ultrasonic detection technology

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