Review of atomic MEMS: Driving technologies and challenges

Haifeng Dong; Jiancheng Fang; Binquan Zhou; Jie Qin; Shuangai Wan

doi:10.1007/s00542-010-1089-6

Review of atomic MEMS: Driving technologies and challenges

Haifeng Dong^*
, Jiancheng Fang
, Binquan Zhou
, Jie Qin
, Shuangai Wan

^*Corresponding author for this work

School of Instrumentation and Optoelectronic Engineering

Beihang University

Research output: Contribution to journal › Review article › peer-review

18 Scopus citations

Abstract

Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.

Original language	English
Pages (from-to)	1683-1689
Number of pages	7
Journal	Microsystem Technologies
Volume	16
Issue number	10
DOIs	https://doi.org/10.1007/s00542-010-1089-6
State	Published - Oct 2010

Access to Document

10.1007/s00542-010-1089-6

Cite this

@article{05cb4e511f7a42859417a68e882014ba,

title = "Review of atomic MEMS: Driving technologies and challenges",

abstract = "Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.",

author = "Haifeng Dong and Jiancheng Fang and Binquan Zhou and Jie Qin and Shuangai Wan",

year = "2010",

month = oct,

doi = "10.1007/s00542-010-1089-6",

language = "英语",

volume = "16",

pages = "1683--1689",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer Science and Business Media Deutschland GmbH",

number = "10",

}

TY - JOUR

T1 - Review of atomic MEMS

T2 - Driving technologies and challenges

AU - Dong, Haifeng

AU - Fang, Jiancheng

AU - Zhou, Binquan

AU - Qin, Jie

AU - Wan, Shuangai

PY - 2010/10

Y1 - 2010/10

N2 - Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.

AB - Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.

UR - https://www.scopus.com/pages/publications/78149407066

U2 - 10.1007/s00542-010-1089-6

DO - 10.1007/s00542-010-1089-6

M3 - 文献综述

AN - SCOPUS:78149407066

SN - 0946-7076

VL - 16

SP - 1683

EP - 1689

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 10

ER -

Review of atomic MEMS: Driving technologies and challenges

Abstract

Access to Document

Other files and links

Fingerprint

Cite this