Resonator design for MOEMS gyroscope

Micro-opto-electro-mechanical systems (MOEMS) gyroscope is one of the most potential development directions of micro-optical gyroscope. MOEMS resonator design is the key technique of MOEMS resonator gyroscope. A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced. The mathematical model was established. Important parameters of the resonator were calculated and analyzed with MATLAB. The in-out mirror of the resonator was optimized to increase the finesse of the resonator and the sensitivity of the gyroscope. The micro-fabrication technics of resonator was designed. Results demonstrate that the finesse of the resonator can be 346, the sensitivity of the gyroscope reaches 0.25(°)/h, and noise induced by Kerr effect, backscattering and so on can be overcome effectively.