Resonant integrated optical gyroscope based on Si₃N₄ waveguide ring resonator

A resonant integrated optical gyroscope (RIOG) based on silicon nitride (Si₃N₄) waveguide ring resonator (WRR) with single-polarization performance is proposed and demonstrated. The Si₃N₄ WRR has high polarization-dependent loss and can maintain a single polarization state, thereby avoiding other polarization modes from affecting the performance of the RIOG. In this paper, we design and fabricate a Si₃N₄ WRR with a bending radius of 8 mm, which shows excellent single-polarization performance is demonstrated at different temperatures. Finally, a long-term bias stability (3600s) of 0.68°/s in an integration time of 164s are successfully demonstrated. To the best of our knowledge, this is the first reported to date for the Si₃N₄ WRR-based RIOG.