Researches on uniformity of diamond-like carbon films deposited on inner surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation and deposition

Y. Xu; L. H. Li; J. Luo; K. Jing; J. Q. Zhao

doi:10.1016/j.surfcoat.2015.08.056

Researches on uniformity of diamond-like carbon films deposited on inner surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation and deposition

Y. Xu
, L. H. Li^*
, J. Luo
, K. Jing
, J. Q. Zhao

^*Corresponding author for this work

School of Mechanical Engineering and Automation

Beihang University

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII&D) has been successfully used for depositing diamond-like carbon (DLC) on the inner surface of the quartz glass tube with an inner diameter as small as 0.9mm and aspect ratios of over 100. And the uniformity is a key problem for the DLC films deposited on the inner surface. By changing the C₂H₂ flow rate and negative voltage, the effects of the gas flow rate and voltage on the uniformity of the DLC films deposited on the inner surface of the quartz glass tube are experimentally examined. The electron-neutral collision frequency, ν_e, is used to qualitatively analyze the mechanism of uniformizing DLC films. The results reveal that uniform DLC films may be obtained by balancing both the gas flow rate and the negative voltage.

Original language	English
Pages (from-to)	81-85
Number of pages	5
Journal	Surface and Coatings Technology
Volume	280
DOIs	https://doi.org/10.1016/j.surfcoat.2015.08.056
State	Published - 25 Oct 2015

Keywords

Diamond-like carbon (DLC)
Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII&D)
Inner surface
Uniformity

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10.1016/j.surfcoat.2015.08.056

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title = "Researches on uniformity of diamond-like carbon films deposited on inner surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation and deposition",

abstract = "Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII\&D) has been successfully used for depositing diamond-like carbon (DLC) on the inner surface of the quartz glass tube with an inner diameter as small as 0.9mm and aspect ratios of over 100. And the uniformity is a key problem for the DLC films deposited on the inner surface. By changing the C2H2 flow rate and negative voltage, the effects of the gas flow rate and voltage on the uniformity of the DLC films deposited on the inner surface of the quartz glass tube are experimentally examined. The electron-neutral collision frequency, νe, is used to qualitatively analyze the mechanism of uniformizing DLC films. The results reveal that uniform DLC films may be obtained by balancing both the gas flow rate and the negative voltage.",

keywords = "Diamond-like carbon (DLC), Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII\&D), Inner surface, Uniformity",

author = "Y. Xu and Li, \{L. H.\} and J. Luo and K. Jing and Zhao, \{J. Q.\}",

note = "Publisher Copyright: {\textcopyright} 2015 Elsevier B.V.",

year = "2015",

month = oct,

day = "25",

doi = "10.1016/j.surfcoat.2015.08.056",

language = "英语",

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pages = "81--85",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Researches on uniformity of diamond-like carbon films deposited on inner surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation and deposition

AU - Xu, Y.

AU - Li, L. H.

AU - Luo, J.

AU - Jing, K.

AU - Zhao, J. Q.

PY - 2015/10/25

Y1 - 2015/10/25

N2 - Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII&D) has been successfully used for depositing diamond-like carbon (DLC) on the inner surface of the quartz glass tube with an inner diameter as small as 0.9mm and aspect ratios of over 100. And the uniformity is a key problem for the DLC films deposited on the inner surface. By changing the C2H2 flow rate and negative voltage, the effects of the gas flow rate and voltage on the uniformity of the DLC films deposited on the inner surface of the quartz glass tube are experimentally examined. The electron-neutral collision frequency, νe, is used to qualitatively analyze the mechanism of uniformizing DLC films. The results reveal that uniform DLC films may be obtained by balancing both the gas flow rate and the negative voltage.

AB - Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII&D) has been successfully used for depositing diamond-like carbon (DLC) on the inner surface of the quartz glass tube with an inner diameter as small as 0.9mm and aspect ratios of over 100. And the uniformity is a key problem for the DLC films deposited on the inner surface. By changing the C2H2 flow rate and negative voltage, the effects of the gas flow rate and voltage on the uniformity of the DLC films deposited on the inner surface of the quartz glass tube are experimentally examined. The electron-neutral collision frequency, νe, is used to qualitatively analyze the mechanism of uniformizing DLC films. The results reveal that uniform DLC films may be obtained by balancing both the gas flow rate and the negative voltage.

KW - Diamond-like carbon (DLC)

KW - Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PIII&D)

KW - Inner surface

KW - Uniformity

UR - https://www.scopus.com/pages/publications/84944220260

U2 - 10.1016/j.surfcoat.2015.08.056

DO - 10.1016/j.surfcoat.2015.08.056

M3 - 文章

AN - SCOPUS:84944220260

SN - 0257-8972

VL - 280

SP - 81

EP - 85

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Researches on uniformity of diamond-like carbon films deposited on inner surface of long and slender quartz glass tube by enhanced glow discharge plasma immersion ion implantation and deposition

Abstract

Keywords

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