Researches on closed-loop adjustment of MOEMS gyroscope spatial resonator

Hui Lan Liu; Zai You Pan; Huan Liu; Yong Wang

Researches on closed-loop adjustment of MOEMS gyroscope spatial resonator

Hui Lan Liu^*
, Zai You Pan
, Huan Liu
, Yong Wang

^*Corresponding author for this work

School of Instrumentation and Optoelectronic Engineering

Beihang University

Research output: Contribution to journal › Article › peer-review

Abstract

As the key element of MOEMS Gyroscope, the resonator has relative maladjustment character. It was adjusted manually in the past. A new scheme of closed-loop adjustment is put forward which can be applied in MOEMS gyroscope resonator. The closed-loop adjustment system and adjustment experiment are completed. The adjustment system is based on machine vision and PZT control. The result accords with the expectation.

Original language	English
Pages (from-to)	172-175
Number of pages	4
Journal	Guangxue Jishu/Optical Technique
Volume	36
Issue number	2
State	Published - Mar 2010

Keywords

Closed-loop adjustment
Gyroscope
MOEMS
Resonator

Cite this

@article{6a969591a3044be0a29994ba69e1a734,

title = "Researches on closed-loop adjustment of MOEMS gyroscope spatial resonator",

abstract = "As the key element of MOEMS Gyroscope, the resonator has relative maladjustment character. It was adjusted manually in the past. A new scheme of closed-loop adjustment is put forward which can be applied in MOEMS gyroscope resonator. The closed-loop adjustment system and adjustment experiment are completed. The adjustment system is based on machine vision and PZT control. The result accords with the expectation.",

keywords = "Closed-loop adjustment, Gyroscope, MOEMS, Resonator",

author = "Liu, \{Hui Lan\} and Pan, \{Zai You\} and Huan Liu and Yong Wang",

year = "2010",

month = mar,

language = "英语",

volume = "36",

pages = "172--175",

journal = "Guangxue Jishu/Optical Technique",

issn = "1002-1582",

publisher = "Optical Technique",

number = "2",

}

TY - JOUR

T1 - Researches on closed-loop adjustment of MOEMS gyroscope spatial resonator

AU - Liu, Hui Lan

AU - Pan, Zai You

AU - Liu, Huan

AU - Wang, Yong

PY - 2010/3

Y1 - 2010/3

N2 - As the key element of MOEMS Gyroscope, the resonator has relative maladjustment character. It was adjusted manually in the past. A new scheme of closed-loop adjustment is put forward which can be applied in MOEMS gyroscope resonator. The closed-loop adjustment system and adjustment experiment are completed. The adjustment system is based on machine vision and PZT control. The result accords with the expectation.

AB - As the key element of MOEMS Gyroscope, the resonator has relative maladjustment character. It was adjusted manually in the past. A new scheme of closed-loop adjustment is put forward which can be applied in MOEMS gyroscope resonator. The closed-loop adjustment system and adjustment experiment are completed. The adjustment system is based on machine vision and PZT control. The result accords with the expectation.

KW - Closed-loop adjustment

KW - Gyroscope

KW - MOEMS

KW - Resonator

UR - https://www.scopus.com/pages/publications/77951986614

M3 - 文章

AN - SCOPUS:77951986614

SN - 1002-1582

VL - 36

SP - 172

EP - 175

JO - Guangxue Jishu/Optical Technique

JF - Guangxue Jishu/Optical Technique

IS - 2

ER -

Researches on closed-loop adjustment of MOEMS gyroscope spatial resonator

Abstract

Keywords

Other files and links

Fingerprint

Cite this