Researches on a novel MOEMS interferometric gyroscope

Huilan Liu; Lishuang Feng; Heng Lin; Chunxi Zhang

doi:10.1117/12.717807

Researches on a novel MOEMS interferometric gyroscope

Huilan Liu^*
, Lishuang Feng
, Heng Lin
, Chunxi Zhang

^*Corresponding author for this work

School of Instrumentation and Optoelectronic Engineering

Beihang University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

MOEMS (Micro-Opto-Electro-Mechanical System) gyroscope is one of the research hotspot of international inertial domain. It combines advantages of optical detect principle of optical gyroscopes and MEMS (Micro-Electro- Mechanical System) fabrication technique. It is solid-state. It has little volume, light weight, good stability, and large dynamic scale. And it can be batch fabricated. These make it has large applications in inertial technology domain. A MOEMS interferometric gyroscope which uses spatial optical paths to sensitive Sagnac effect is presented. A spatial helical optical structure composed of micromirrors was designed. Light traveled in free space, which could reduce wastage. The gyroscope has no coupling problem, no back scatter, and no movable parts. The structure of the gyroscope has advantages in microminiaturization. It could be manufactured using MEMS technics. Theoretical analyses were made to parameters of the spatial optical path from the viewpoint of improving the fundamental detection limit. Theorem proving experiment was researched. Based on experiment design, output signals of the gyroscope on rotate platform were measured using Lock-in amplifier and other instruments. Theorem proving of the Sagnac effect is realized, and the bias stability of the gyroscope system is about 8°/h.

Original language	English
Title of host publication	Sixth International Symposium on Instrumentation and Control Technology
Subtitle of host publication	Sensors, Automatics Measurement, Control, and Computer Simulation
DOIs	https://doi.org/10.1117/12.717807
State	Published - 2006
Event	Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control and Computer Simulation - Beijing, China Duration: 13 Oct 2006 → 15 Oct 2006

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6358 I
ISSN (Print)	0277-786X

Conference

Conference	Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control and Computer Simulation
Country/Territory	China
City	Beijing
Period	13/10/06 → 15/10/06

Keywords

Gyroscopes
Micro-Opto-Electro-Mechanical System (MOEMS)
Micromirror
Spatial optical paths

Access to Document

10.1117/12.717807

Cite this

Liu, H., Feng, L., Lin, H., & Zhang, C. (2006). Researches on a novel MOEMS interferometric gyroscope. In Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatics Measurement, Control, and Computer Simulation Article 63580W (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6358 I). https://doi.org/10.1117/12.717807

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title = "Researches on a novel MOEMS interferometric gyroscope",

abstract = "MOEMS (Micro-Opto-Electro-Mechanical System) gyroscope is one of the research hotspot of international inertial domain. It combines advantages of optical detect principle of optical gyroscopes and MEMS (Micro-Electro- Mechanical System) fabrication technique. It is solid-state. It has little volume, light weight, good stability, and large dynamic scale. And it can be batch fabricated. These make it has large applications in inertial technology domain. A MOEMS interferometric gyroscope which uses spatial optical paths to sensitive Sagnac effect is presented. A spatial helical optical structure composed of micromirrors was designed. Light traveled in free space, which could reduce wastage. The gyroscope has no coupling problem, no back scatter, and no movable parts. The structure of the gyroscope has advantages in microminiaturization. It could be manufactured using MEMS technics. Theoretical analyses were made to parameters of the spatial optical path from the viewpoint of improving the fundamental detection limit. Theorem proving experiment was researched. Based on experiment design, output signals of the gyroscope on rotate platform were measured using Lock-in amplifier and other instruments. Theorem proving of the Sagnac effect is realized, and the bias stability of the gyroscope system is about 8°/h.",

keywords = "Gyroscopes, Micro-Opto-Electro-Mechanical System (MOEMS), Micromirror, Spatial optical paths",

author = "Huilan Liu and Lishuang Feng and Heng Lin and Chunxi Zhang",

year = "2006",

doi = "10.1117/12.717807",

language = "英语",

isbn = "0819464538",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Sixth International Symposium on Instrumentation and Control Technology",

note = "Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control and Computer Simulation ; Conference date: 13-10-2006 Through 15-10-2006",

}

Liu, H , Feng, L, Lin, H & Zhang, C 2006, Researches on a novel MOEMS interferometric gyroscope. in Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatics Measurement, Control, and Computer Simulation., 63580W, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6358 I, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control and Computer Simulation, Beijing, China, 13/10/06. https://doi.org/10.1117/12.717807

Researches on a novel MOEMS interferometric gyroscope. / Liu, Huilan ; Feng, Lishuang; Lin, Heng et al.
Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatics Measurement, Control, and Computer Simulation. 2006. 63580W (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6358 I).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Researches on a novel MOEMS interferometric gyroscope

AU - Liu, Huilan

AU - Feng, Lishuang

AU - Lin, Heng

AU - Zhang, Chunxi

PY - 2006

Y1 - 2006

N2 - MOEMS (Micro-Opto-Electro-Mechanical System) gyroscope is one of the research hotspot of international inertial domain. It combines advantages of optical detect principle of optical gyroscopes and MEMS (Micro-Electro- Mechanical System) fabrication technique. It is solid-state. It has little volume, light weight, good stability, and large dynamic scale. And it can be batch fabricated. These make it has large applications in inertial technology domain. A MOEMS interferometric gyroscope which uses spatial optical paths to sensitive Sagnac effect is presented. A spatial helical optical structure composed of micromirrors was designed. Light traveled in free space, which could reduce wastage. The gyroscope has no coupling problem, no back scatter, and no movable parts. The structure of the gyroscope has advantages in microminiaturization. It could be manufactured using MEMS technics. Theoretical analyses were made to parameters of the spatial optical path from the viewpoint of improving the fundamental detection limit. Theorem proving experiment was researched. Based on experiment design, output signals of the gyroscope on rotate platform were measured using Lock-in amplifier and other instruments. Theorem proving of the Sagnac effect is realized, and the bias stability of the gyroscope system is about 8°/h.

AB - MOEMS (Micro-Opto-Electro-Mechanical System) gyroscope is one of the research hotspot of international inertial domain. It combines advantages of optical detect principle of optical gyroscopes and MEMS (Micro-Electro- Mechanical System) fabrication technique. It is solid-state. It has little volume, light weight, good stability, and large dynamic scale. And it can be batch fabricated. These make it has large applications in inertial technology domain. A MOEMS interferometric gyroscope which uses spatial optical paths to sensitive Sagnac effect is presented. A spatial helical optical structure composed of micromirrors was designed. Light traveled in free space, which could reduce wastage. The gyroscope has no coupling problem, no back scatter, and no movable parts. The structure of the gyroscope has advantages in microminiaturization. It could be manufactured using MEMS technics. Theoretical analyses were made to parameters of the spatial optical path from the viewpoint of improving the fundamental detection limit. Theorem proving experiment was researched. Based on experiment design, output signals of the gyroscope on rotate platform were measured using Lock-in amplifier and other instruments. Theorem proving of the Sagnac effect is realized, and the bias stability of the gyroscope system is about 8°/h.

KW - Gyroscopes

KW - Micro-Opto-Electro-Mechanical System (MOEMS)

KW - Micromirror

KW - Spatial optical paths

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DO - 10.1117/12.717807

M3 - 会议稿件

AN - SCOPUS:33846603186

SN - 0819464538

SN - 9780819464538

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Sixth International Symposium on Instrumentation and Control Technology

T2 - Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control and Computer Simulation

Y2 - 13 October 2006 through 15 October 2006

ER -

Researches on a novel MOEMS interferometric gyroscope

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Keywords

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