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Research on the characteristics of graphene-metal contact

  • Chunyu Pan
  • , Jing Wu
  • , Jingwen Zhang
  • , Songling Huang
  • , Yue Long
  • Beihang University
  • Tsinghua University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

As a new type of semiconductor material with good electrical and mechanical properties, graphene has broad applications. The important factor affecting the performance of graphene devices is the contact resistance of graphene and metal, which is much higher than traditional semiconductor contact resistance. Based on MOSFET structure, the graphenemetal contact resistance is analyzed by Laudauer formula, where the graphene-metal atomic distance is simulated by the density functional theory. The simulation results show that the graphene-metal contact has two kinds of characteristics which are chemical absorption such as graphene-Pd and physical absorption such as graphene-Pt. The contact resistivities of graphene-Pd and graphene-Pt calculated by the presented analytical and simulation method are consistent with the experimental results.

Original languageEnglish
Title of host publicationI2MTC 2020 - International Instrumentation and Measurement Technology Conference, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728144603
DOIs
StatePublished - May 2020
Event2020 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2020 - Dubrovnik, Croatia
Duration: 25 May 202029 May 2020

Publication series

NameI2MTC 2020 - International Instrumentation and Measurement Technology Conference, Proceedings

Conference

Conference2020 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2020
Country/TerritoryCroatia
CityDubrovnik
Period25/05/2029/05/20

Keywords

  • Contact resistance
  • Density functional theory
  • Graphene
  • Laudauer formula

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