Research on the Characteristic simulator for the resonators

To implement the direct checked of the resonant silicon microstructure sensor integrated testing instrument,and optimize the reactive controlling circuit of resonant sensor, a circuit with resonator Characteristics was designed,the resontor is detected piezoresistively. The Characteristics of piezoresistively,which is the crux of the circuit,was achieved by analog circuit. Linear voltage-controlled resistor was obtained. A feedback compensation technology that can be used to expand the frequency bandwidth of this analog circuit was presented,so the frequency response was improved. Experiment results demonstrate that the equivalent output impedance/resistor is controlled by the input voltage, which means the successful simulation of the resonator.