Research on synchronous control of novel XY-table based on adaptive and fuzzy control methods

High performance XY-table is commonly incorporated into integrated circuit (IC) manufacturing and packaging equipments. In order to achieve a higher acceleration, a novel XY positioning table redundantly driven by one-side dual linear motors was proposed. The redundant drive system commonly suffers from synchronous motion precision problem at high speed and acceleration rates. The mathematical model of dual linear motors redundant drive system along X-axis direction was given. Meanwhile, motion controllers were designed based on model reference adaptive control and adaptive fuzzy control algorithms to assure the synchronous motion precision. The simulation results show that the control system has better static and dynamic performance and higher synchronous motion precision at a high acceleration profile motion.