Property of multilayer TiCN films formed by ion-beam-assisted-deposition

Jie Jin; Zhiqian Xu; Jinhui Wang; Jianchuan Ming; Qiqian Guo; Liuhe Li

Property of multilayer TiCN films formed by ion-beam-assisted-deposition

Jie Jin^*
, Zhiqian Xu
, Jinhui Wang
, Jianchuan Ming
, Qiqian Guo
, Liuhe Li

^*Corresponding author for this work

School of Mechanical Engineering and Automation

CAS - Institute of Automation

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The TiCN functional film was deposited on 45# steel and Si substrates with ion beam assisted deposition and studied with SEM, Micro hardness test, WS-88 scratcher and Pin-on-disk tribometer. The adhesion was tested with WS-88 scratcher, the result shows that the structure has great influence on the film. The film was formed with multilayer, crystal and uncrystal. The experimental result proves that the film has good adhesion with substrate and low friction coefficient.

Original language	English
Pages (from-to)	1019-1022
Number of pages	4
Journal	He Jishu/Nuclear Techniques
Volume	30
Issue number	12
State	Published - Dec 2007

Keywords

Crystalline
Ion beam assisted deposition
Multilayer films

Cite this

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title = "Property of multilayer TiCN films formed by ion-beam-assisted-deposition",

abstract = "The TiCN functional film was deposited on 45\# steel and Si substrates with ion beam assisted deposition and studied with SEM, Micro hardness test, WS-88 scratcher and Pin-on-disk tribometer. The adhesion was tested with WS-88 scratcher, the result shows that the structure has great influence on the film. The film was formed with multilayer, crystal and uncrystal. The experimental result proves that the film has good adhesion with substrate and low friction coefficient.",

keywords = "Crystalline, Ion beam assisted deposition, Multilayer films",

author = "Jie Jin and Zhiqian Xu and Jinhui Wang and Jianchuan Ming and Qiqian Guo and Liuhe Li",

year = "2007",

month = dec,

language = "英语",

volume = "30",

pages = "1019--1022",

journal = "He Jishu/Nuclear Techniques",

issn = "0253-3219",

publisher = "Science Press ",

number = "12",

}

TY - JOUR

T1 - Property of multilayer TiCN films formed by ion-beam-assisted-deposition

AU - Jin, Jie

AU - Xu, Zhiqian

AU - Wang, Jinhui

AU - Ming, Jianchuan

AU - Guo, Qiqian

AU - Li, Liuhe

PY - 2007/12

Y1 - 2007/12

N2 - The TiCN functional film was deposited on 45# steel and Si substrates with ion beam assisted deposition and studied with SEM, Micro hardness test, WS-88 scratcher and Pin-on-disk tribometer. The adhesion was tested with WS-88 scratcher, the result shows that the structure has great influence on the film. The film was formed with multilayer, crystal and uncrystal. The experimental result proves that the film has good adhesion with substrate and low friction coefficient.

AB - The TiCN functional film was deposited on 45# steel and Si substrates with ion beam assisted deposition and studied with SEM, Micro hardness test, WS-88 scratcher and Pin-on-disk tribometer. The adhesion was tested with WS-88 scratcher, the result shows that the structure has great influence on the film. The film was formed with multilayer, crystal and uncrystal. The experimental result proves that the film has good adhesion with substrate and low friction coefficient.

KW - Crystalline

KW - Ion beam assisted deposition

KW - Multilayer films

UR - https://www.scopus.com/pages/publications/38049132279

M3 - 文章

AN - SCOPUS:38049132279

SN - 0253-3219

VL - 30

SP - 1019

EP - 1022

JO - He Jishu/Nuclear Techniques

JF - He Jishu/Nuclear Techniques

IS - 12

ER -

Property of multilayer TiCN films formed by ion-beam-assisted-deposition

Abstract

Keywords

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