Preparation and charaterization of ZnO piezoeletric film

Heng Xing Xu; Jin Liang Wang; Ning Tang; Hong Yong Peng; Chao Fan

Preparation and charaterization of ZnO piezoeletric film

Heng Xing Xu^*
, Jin Liang Wang
, Ning Tang
, Hong Yong Peng
, Chao Fan

^*Corresponding author for this work

School of Physics

Beihang University

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

ZnO films were prepared on Si (100) substrates by RF magnetron sputtering process. Compositions, surface appearance, and piezoelectricity were studied by XRD, AFM and PFM. The results indicate that the prepared ZnO film has excellent piezoelectricity. The piezoelectricity of the film is strongly dependent on the c axis orientation and surface roughness. The sample with smoother surface and a strongly preferred orientation of c axis shows a better piezoelectricity.

Original language	English
Pages (from-to)	880-883
Number of pages	4
Journal	Rengong Jingti Xuebao/Journal of Synthetic Crystals
Volume	38
Issue number	4
State	Published - Aug 2009

Keywords

Piezoelectricity
RF magnetron sputtering
Surface roughness
ZnO film

Cite this

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title = "Preparation and charaterization of ZnO piezoeletric film",

abstract = "ZnO films were prepared on Si (100) substrates by RF magnetron sputtering process. Compositions, surface appearance, and piezoelectricity were studied by XRD, AFM and PFM. The results indicate that the prepared ZnO film has excellent piezoelectricity. The piezoelectricity of the film is strongly dependent on the c axis orientation and surface roughness. The sample with smoother surface and a strongly preferred orientation of c axis shows a better piezoelectricity.",

keywords = "Piezoelectricity, RF magnetron sputtering, Surface roughness, ZnO film",

author = "Xu, \{Heng Xing\} and Wang, \{Jin Liang\} and Ning Tang and Peng, \{Hong Yong\} and Chao Fan",

year = "2009",

month = aug,

language = "英语",

volume = "38",

pages = "880--883",

journal = "Rengong Jingti Xuebao/Journal of Synthetic Crystals",

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TY - JOUR

T1 - Preparation and charaterization of ZnO piezoeletric film

AU - Xu, Heng Xing

AU - Wang, Jin Liang

AU - Tang, Ning

AU - Peng, Hong Yong

AU - Fan, Chao

PY - 2009/8

Y1 - 2009/8

N2 - ZnO films were prepared on Si (100) substrates by RF magnetron sputtering process. Compositions, surface appearance, and piezoelectricity were studied by XRD, AFM and PFM. The results indicate that the prepared ZnO film has excellent piezoelectricity. The piezoelectricity of the film is strongly dependent on the c axis orientation and surface roughness. The sample with smoother surface and a strongly preferred orientation of c axis shows a better piezoelectricity.

AB - ZnO films were prepared on Si (100) substrates by RF magnetron sputtering process. Compositions, surface appearance, and piezoelectricity were studied by XRD, AFM and PFM. The results indicate that the prepared ZnO film has excellent piezoelectricity. The piezoelectricity of the film is strongly dependent on the c axis orientation and surface roughness. The sample with smoother surface and a strongly preferred orientation of c axis shows a better piezoelectricity.

KW - Piezoelectricity

KW - RF magnetron sputtering

KW - Surface roughness

KW - ZnO film

UR - https://www.scopus.com/pages/publications/70249146912

M3 - 文章

AN - SCOPUS:70249146912

SN - 1000-985X

VL - 38

SP - 880

EP - 883

JO - Rengong Jingti Xuebao/Journal of Synthetic Crystals

JF - Rengong Jingti Xuebao/Journal of Synthetic Crystals

IS - 4

ER -

Preparation and charaterization of ZnO piezoeletric film

Abstract

Keywords

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