TY - GEN
T1 - Piezoactuator-integrated monolithic microstage with six degrees of freedom
AU - Zhang, De Yuan
AU - Ono, T.
AU - Esashi, M.
N1 - Publisher Copyright:
© 2003 IEEE.
PY - 2003
Y1 - 2003
N2 - In comparison with miniature XY-stage in terms of driving methods: electrostatic, electromagnetic and piezoelectric actuators, the piezoelectric actuators have high area efficiency but no machinability by conventional microfabrication techniques. In this paper we have proposed the novel fabrication method of a double-layered piezo-stack actuator made from a monolithic PZT plate based on a planer fabrication method, and integrated the actuators into a XYZ-stage with six degrees of freedom, i.e., X, Y, X, θx, θy and θz directions. The stacked piezoactuators were formed on the both side of the PZT plate. The double stacked-piezoactuators, which are arranged around the stage, can stretch in plane or bend to Z-direction. The fabrication method includes dicing, electroplating, and laser machining. After making grooves by dicing, metal electroplating was performed and buried Ni into the grooves, which was done on both side of the PZT plate. After polishing the surface, metal electrodes were formed on an insulating photosensitive polyimide layer. Finally, the complete structure was defined by laser machining. The test results show that the X direction displacement of the actuation arms was about 2 μm when 40 V was applied to both of double-layered piezo-stacked actuators. The Z direction displacement of the actuation beam was about 2 μm when 40 V was only applied to one stacked actuator. These results show the possibility of the microstage with six degrees of freedom.
AB - In comparison with miniature XY-stage in terms of driving methods: electrostatic, electromagnetic and piezoelectric actuators, the piezoelectric actuators have high area efficiency but no machinability by conventional microfabrication techniques. In this paper we have proposed the novel fabrication method of a double-layered piezo-stack actuator made from a monolithic PZT plate based on a planer fabrication method, and integrated the actuators into a XYZ-stage with six degrees of freedom, i.e., X, Y, X, θx, θy and θz directions. The stacked piezoactuators were formed on the both side of the PZT plate. The double stacked-piezoactuators, which are arranged around the stage, can stretch in plane or bend to Z-direction. The fabrication method includes dicing, electroplating, and laser machining. After making grooves by dicing, metal electroplating was performed and buried Ni into the grooves, which was done on both side of the PZT plate. After polishing the surface, metal electrodes were formed on an insulating photosensitive polyimide layer. Finally, the complete structure was defined by laser machining. The test results show that the X direction displacement of the actuation arms was about 2 μm when 40 V was applied to both of double-layered piezo-stacked actuators. The Z direction displacement of the actuation beam was about 2 μm when 40 V was only applied to one stacked actuator. These results show the possibility of the microstage with six degrees of freedom.
KW - Arm
KW - Electrodes
KW - Electrostatics
KW - Insulation
KW - Machining
KW - Metalworking machines
KW - Optical device fabrication
KW - Piezoelectric actuators
KW - Polyimides
KW - Testing
UR - https://www.scopus.com/pages/publications/84944751085
U2 - 10.1109/SENSOR.2003.1217066
DO - 10.1109/SENSOR.2003.1217066
M3 - 会议稿件
AN - SCOPUS:84944751085
T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
SP - 1518
EP - 1521
BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Y2 - 8 June 2003 through 12 June 2003
ER -