TY - GEN
T1 - Pendulum micromechanical angular accelerometer with force feedback
AU - Jianli, Li
AU - Jiancheng, Fang
AU - Wei, Sheng
PY - 2007
Y1 - 2007
N2 - This paper bring forward a kind of pendulum micromechanical angular accelerometer with force feedback, which might be proposed by us, first. The sensor adopts a pendulum with mass joined to the anchors by a pair torsionspring beams as sensing device, differential-capacitor device for detecting the angular acceleration about the X axis, an electrostatic force device for feedback loop. The sensor's structure and basic operating principle were discussed. The theoretical relation of angular acceleration and output of sensor was derived in detail based on the geometrical and dynamical models. The simulation result shows that the scale factor of sensor is0.3889V /r/s and verifies the accuracy of the theories model. It can be used in robust motor control of industrial robots and aerocraft.
AB - This paper bring forward a kind of pendulum micromechanical angular accelerometer with force feedback, which might be proposed by us, first. The sensor adopts a pendulum with mass joined to the anchors by a pair torsionspring beams as sensing device, differential-capacitor device for detecting the angular acceleration about the X axis, an electrostatic force device for feedback loop. The sensor's structure and basic operating principle were discussed. The theoretical relation of angular acceleration and output of sensor was derived in detail based on the geometrical and dynamical models. The simulation result shows that the scale factor of sensor is0.3889V /r/s and verifies the accuracy of the theories model. It can be used in robust motor control of industrial robots and aerocraft.
KW - Angular accelerometer
KW - Electrostatic force feedback
KW - Micromechanical pendulum
UR - https://www.scopus.com/pages/publications/37049014694
U2 - 10.1109/ICMA.2007.4303979
DO - 10.1109/ICMA.2007.4303979
M3 - 会议稿件
AN - SCOPUS:37049014694
SN - 1424408288
SN - 9781424408283
T3 - Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007
SP - 2673
EP - 2677
BT - Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007
T2 - 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007
Y2 - 5 August 2007 through 8 August 2007
ER -