Pendulous micromechanical silicon angular accelerometer with force feedback

In order to provide angular acceleration information for various control, monitor or navigation system, this paper presents a kind of pendulous micromechanical silicon angular accelerometer with force feedback, which might be proposed by us first, as a sensor to detect angular acceleration. It composes of sensitive element, capacitive transducer and electrostatic force feedback loop. The structure and operation principle of the sensor are introduced in detail. The kinetic equation and sensitivity of the sensor are given. Simulation result verifies the accuracy of the theoretic model. The sensitivity of the sensor is 0.3889 V·(r·s^-1)^-1. The sensor features small bulk, light weight, low power consumption, good zero offset stability, low noise and etc.