TY - GEN
T1 - Packaging and testing of high speed rotor for MEMS gas turbine engines
AU - Yan, Xiaojun
AU - Zhang, Guohui
AU - Tan, Xiao
AU - Chen, Xia
AU - Zhang, Xiaoyong
AU - Li, Haiwang
AU - Tao, Zhi
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2017/2/21
Y1 - 2017/2/21
N2 - A micro rotor with high rotation speed is of vital importance for MEMS gas turbine engine to achieve its higher power density and transfer energy with high efficiency. In this investigation, a micro silicon rotor, which is fabricated by one-time multi-depth silicon etching method and supported by a 3-wafers bearing system, is completed to reach high rotation speed. To ensure wafer bonding quality, a non-destructive method based on analyzing infrared images through multilayer wafers is proposed and practiced. After the rotor and its bearing system are packaged successfully, a platform which consists of the rotor, the 3-wafers bearing system, air supply and control systems is established for testing and optimizing performance of the high speed micro rotor. The platform's control scheme is closed-loop and is based on the principle of stiffness changing, in which the stiffness of the bearing system is varied by adjusting inlet pressure based on the rotation speed.
AB - A micro rotor with high rotation speed is of vital importance for MEMS gas turbine engine to achieve its higher power density and transfer energy with high efficiency. In this investigation, a micro silicon rotor, which is fabricated by one-time multi-depth silicon etching method and supported by a 3-wafers bearing system, is completed to reach high rotation speed. To ensure wafer bonding quality, a non-destructive method based on analyzing infrared images through multilayer wafers is proposed and practiced. After the rotor and its bearing system are packaged successfully, a platform which consists of the rotor, the 3-wafers bearing system, air supply and control systems is established for testing and optimizing performance of the high speed micro rotor. The platform's control scheme is closed-loop and is based on the principle of stiffness changing, in which the stiffness of the bearing system is varied by adjusting inlet pressure based on the rotation speed.
UR - https://www.scopus.com/pages/publications/85016108016
U2 - 10.1109/EPTC.2016.7861596
DO - 10.1109/EPTC.2016.7861596
M3 - 会议稿件
AN - SCOPUS:85016108016
T3 - Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016
SP - 829
EP - 833
BT - Proceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 18th IEEE Electronics Packaging Technology Conference, EPTC 2016
Y2 - 30 November 2016 through 3 December 2016
ER -