Ordered metal film pattern with submicron period

Zhuwei Zhang; Chuanfei Guo; Sihai Cao; Lifeng Bai; Yong Xie; Qian Liu

doi:10.1143/JJAP.48.090208

Ordered metal film pattern with submicron period

Zhuwei Zhang^*
, Chuanfei Guo
, Sihai Cao
, Lifeng Bai
, Yong Xie
, Qian Liu

^*Corresponding author for this work

School of Physics

National Center for Nanoscience and Technology
University of Chinese Academy of Sciences
Northwest Institute for Nonferrous Metal Research

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The wavelength of a metallic wrinkle has been decreased to 500nm using a polymer/metal bilayer system. The good agreement of experimental results with an existing theory indicates that a continuous mechanical model is still appropriate for polymer/metal bilayer wrinkling even when a metal film is ultrathin at 5 nm thickness. The order of the submicron structure can be effectively controlled by prefabricating structures on polymer underlays. A large-area, cost-effective method of fabricating the submicron structure is provided and shows potential in nanostructure fabrication.

Original language	English
Pages (from-to)	902081-902083
Number of pages	3
Journal	Japanese Journal of Applied Physics
Volume	48
Issue number	9 Part 1
DOIs	https://doi.org/10.1143/JJAP.48.090208
State	Published - 2009

Access to Document

10.1143/JJAP.48.090208

Cite this

@article{24670828e605400a9b38a031f64819cf,

title = "Ordered metal film pattern with submicron period",

abstract = "The wavelength of a metallic wrinkle has been decreased to 500nm using a polymer/metal bilayer system. The good agreement of experimental results with an existing theory indicates that a continuous mechanical model is still appropriate for polymer/metal bilayer wrinkling even when a metal film is ultrathin at 5 nm thickness. The order of the submicron structure can be effectively controlled by prefabricating structures on polymer underlays. A large-area, cost-effective method of fabricating the submicron structure is provided and shows potential in nanostructure fabrication.",

author = "Zhuwei Zhang and Chuanfei Guo and Sihai Cao and Lifeng Bai and Yong Xie and Qian Liu",

year = "2009",

doi = "10.1143/JJAP.48.090208",

language = "英语",

volume = "48",

pages = "902081--902083",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "9 Part 1",

}

TY - JOUR

T1 - Ordered metal film pattern with submicron period

AU - Zhang, Zhuwei

AU - Guo, Chuanfei

AU - Cao, Sihai

AU - Bai, Lifeng

AU - Xie, Yong

AU - Liu, Qian

PY - 2009

Y1 - 2009

N2 - The wavelength of a metallic wrinkle has been decreased to 500nm using a polymer/metal bilayer system. The good agreement of experimental results with an existing theory indicates that a continuous mechanical model is still appropriate for polymer/metal bilayer wrinkling even when a metal film is ultrathin at 5 nm thickness. The order of the submicron structure can be effectively controlled by prefabricating structures on polymer underlays. A large-area, cost-effective method of fabricating the submicron structure is provided and shows potential in nanostructure fabrication.

AB - The wavelength of a metallic wrinkle has been decreased to 500nm using a polymer/metal bilayer system. The good agreement of experimental results with an existing theory indicates that a continuous mechanical model is still appropriate for polymer/metal bilayer wrinkling even when a metal film is ultrathin at 5 nm thickness. The order of the submicron structure can be effectively controlled by prefabricating structures on polymer underlays. A large-area, cost-effective method of fabricating the submicron structure is provided and shows potential in nanostructure fabrication.

UR - https://www.scopus.com/pages/publications/77952692838

U2 - 10.1143/JJAP.48.090208

DO - 10.1143/JJAP.48.090208

M3 - 文章

AN - SCOPUS:77952692838

SN - 0021-4922

VL - 48

SP - 902081

EP - 902083

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 9 Part 1

ER -

Ordered metal film pattern with submicron period

Abstract

Access to Document

Other files and links

Fingerprint

Cite this