Optimization of the Manufacturing Defects of Plunger Unit based on Ion Implantation

Plunger unit is one key component of plunger bump and its manufacture quality decides the performance of plunger bump. In the necking-in process of plunger seat, there always be a large amount of manufacturing defects including violent plastic deformation, manufacturing stress and micro-structure transformation. And when plunger units work normally, these defects may lead to failure even equipment broken coupling with the complicated working condition and other environment factors. To address this issue, the ordinary failure forms of plunger unit are summarized from the factory. Manufacturing stress is chosen as the key factor influencing the reliability of components existing in the surface of the plunger seat. And combining with physics of failure, the relation between manufacturing stress and other defect is discussed. After that, Ion implantation technology is used to change surface structure to optimize manufacturing defects. FEM is used to simulate pull-off force and residual stress. Friction and wear test is carried out to measure the variation of friction coefficient. Finally, reliability of plunger units is improved by comparing performance parameters.