Optical Remote Sensor Calibration Using Micromachined Multiplexing Optical Focal Planes

Traditional calibration approaches for optical remote sensor are based on single-pixel illumination through collimated light using measuring angles. However, the vibration of rotating turntable and accuracy of angle measurement affect the calibration accuracy. In this paper, we propose a new geometrical calibration approach with micromachined multiplexing optical focal plane (MOFP) combined with a collimating device for optical remote sensor. A micromachined procedure is used to manufacture an MOFP using the optimized aperture size. The MOFP, which can produce only one image with multiple diffraction points to calibrate the interior parameters of optical remote senor, is applied as collimated light splitters. Experiments show that this method is sufficient and can be used particularly in ground applications, as well as, in principle, on-orbit calibration.