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Optical metrology embraces deep learning: keeping an open mind

  • Bing Pan*
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Optical metrology practitioners ought to embrace deep learning with an open mind, while devote continuing efforts to look for its theoretical groundwork and maintain an awareness of its limits.

Original languageEnglish
Article number139
JournalLight: Science and Applications
Volume11
Issue number1
DOIs
StatePublished - Dec 2022

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