Optical and electrical properties of ZnO:Al films prepared by tilted magnetron sputtering at low temperature

Aluminum-doped zinc oxide (ZAO) thin films were synthesized via a DC-RF co-sputtering on glass substrates at room temperature. This paper studied the impact of tilt angle of the target on the electrical and optical properties, UV-visible-near infrared area transmittance, X-ray diffraction and surface morphology of the samples. The results show that when the target angle is 23°, the ZAO films are preferred (002) orientation. The lowest sheet resistance could be obtained, which is 17Ω / □. The resistivity is 2.2 × 10^-3Ω · cm. The average transmittance is more than 85% in visible range, and the highest could be more than 95%. UV cut-off and near-infrared reflection effect is obvious.