Abstract
Spatial resonator is the key element of MOEMS gyroscope. Adjustment of the micro-mirrors of spatial resonator is important for realization of the resonator. An adjustment method based on coupling theory for the vertical micro-mirrors in the spatial resonator was presented. For the production of the vertical micro-mirror by micro-processing technology, the principle of the regulation based on coupling was used to complete the space-conditioning as a useful means, rather than avoiding the coupling volume. The basic structure of regulation and the method of implementation were introduced, and the spatial resonator made up of this structure was simulated and analyzed by MATLAB and ANSYS respectively. The results show that the structure based on the method could implement the micro-mirror's spatial regulation with high precision. For the adjustments of the MOEMS gyroscope spatial resonator, this method has its own reliable stability and higher integration, which provide a new method for realization of the spatial resonator MOEMS gyroscope.
| Original language | English |
|---|---|
| Pages (from-to) | 549-552 |
| Number of pages | 4 |
| Journal | Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology |
| Volume | 21 |
| Issue number | 4 |
| State | Published - Aug 2013 |
Keywords
- Adjustment in space
- Coupling theory
- Integration
- MOEMS gyroscope
- Micro-mirror
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