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Non-Contact Fiber Vibration Sensor Based on Intracavity Modulation of an Extrinsic Fabry-Perot Interferometer

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Abstract

This paper describes a phase-demodulated fiber-optic sensor suitable for non-contact vibration detection. The sensor is based on an extrinsic Fabry-Perot (F-P) cavity, formed by a capsulated sensor head and the probed surface. The sensor head, bonded on a piezoelectric (PZT) stack, is driven by a continuous sinusoidal wave, which introduces phase modulation in the interference signal. The varied small displacement induced by vibration of the surface under test is detected utilizing an improved phase-generated carrier technique. The configured F-P sensor is compact and highly sensitive, since neither extra optical path nor frequency modulation of light source is employed for demodulation. Characterization experiment is also conducted using a PZT vibration exciter. The sensor exhibits a high signal-to-noise ratio of 41 dB at 1 kHz and noise limited detectable phase level of 6.3× 10-5 rad, corresponding to a minimum vibration sensitivity of 7.8 pm.

Original languageEnglish
Article number7177034
Pages (from-to)7229-7233
Number of pages5
JournalIEEE Sensors Journal
Volume15
Issue number12
DOIs
StatePublished - Dec 2015
Externally publishedYes

Keywords

  • Fabry-Perot interferometer
  • Fiber optics sensors
  • vibration sensors

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