TY - GEN
T1 - Noise Suppression and Disturbance Rejection Control for Piezo-Actuated Nanopositioning Stages
AU - Wang, Xinyu
AU - Zheng, Jianying
AU - Li, Dongyu
AU - Dong, Fei
AU - Zhong, Jianpeng
AU - Hu, Qinglei
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - This work proposes a noise suppression and disturbance rejection control (NSDRC) strategy for piezo-actuated nanopositioning stages to achieve high bandwidth, strong ro-bustness, and noise suppression. In NSDRC, a noise reduction disturbance observer (NRDO) is designed based on the identified third-order model. Then, the design procedure of the tracking controller is analyzed in the error domain. A full-loop optimization scheme is developed to improve the performance. Finally, the effectiveness of NSDRC is verified by simulation in time domain and frequency domain, respectively. The results show that NSDRC has significant advantages over the classical control methods, including integral resonant control (IRC), positive acceleration, velocity and position feedback (PAVPF) and hierarchical anti-disturbance control (HADC) in terms of bandwidth and robustness. Compared with IRC and HADC, NSDRC also provides a better balance between noise suppression, bandwidth and robustness.
AB - This work proposes a noise suppression and disturbance rejection control (NSDRC) strategy for piezo-actuated nanopositioning stages to achieve high bandwidth, strong ro-bustness, and noise suppression. In NSDRC, a noise reduction disturbance observer (NRDO) is designed based on the identified third-order model. Then, the design procedure of the tracking controller is analyzed in the error domain. A full-loop optimization scheme is developed to improve the performance. Finally, the effectiveness of NSDRC is verified by simulation in time domain and frequency domain, respectively. The results show that NSDRC has significant advantages over the classical control methods, including integral resonant control (IRC), positive acceleration, velocity and position feedback (PAVPF) and hierarchical anti-disturbance control (HADC) in terms of bandwidth and robustness. Compared with IRC and HADC, NSDRC also provides a better balance between noise suppression, bandwidth and robustness.
KW - Piezo-actuated nanopositioning
KW - full-loop parameter optimization
KW - resonance
KW - robustness
UR - https://www.scopus.com/pages/publications/85183586505
U2 - 10.1109/ICCMA59762.2023.10374766
DO - 10.1109/ICCMA59762.2023.10374766
M3 - 会议稿件
AN - SCOPUS:85183586505
T3 - 2023 11th International Conference on Control, Mechatronics and Automation, ICCMA 2023
SP - 439
EP - 444
BT - 2023 11th International Conference on Control, Mechatronics and Automation, ICCMA 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 11th International Conference on Control, Mechatronics and Automation, ICCMA 2023
Y2 - 1 November 2023 through 3 November 2023
ER -