@inproceedings{ad7a1b53f2c442e78c144625251adbf2,
title = "Modeling and simulation for μ-structure silicon pressure sensor",
abstract = "Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined.",
keywords = "Beam, E-type round diaphragm, Finite-element method, Microsensor, Pressure",
author = "Ahmad Aldarouich and Haiwen Yuan and Ali, \{Mohamed El Mahdi\} and Jiaoying Huang",
year = "2009",
doi = "10.1109/ICEMI.2009.5274091",
language = "英语",
isbn = "9781424438624",
series = "ICEMI 2009 - Proceedings of 9th International Conference on Electronic Measurement and Instruments",
publisher = "IEEE Computer Society",
pages = "825--829",
booktitle = "ICEMI 2009 - Proceedings of 9th International Conference on Electronic Measurement and Instruments",
address = "美国",
note = "9th International Conference on Electronic Measurement and Instruments, ICEMI 2009 ; Conference date: 16-08-2009 Through 19-08-2009",
}