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Modeling and control of hi-performance motion system

  • Beihang University
  • ASM Technology Singapore Pte. Ltd.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Based upon the analysis of dynamic features of the motion system with the high velocity, high acceleration and high accuracy, a modeling approach of multi-mode vibration coupled motion within wide frequency range is proposed for the hi-performance motion system, which simplifies the motion system by using "spring plus damper" for flexible connection and "movable spring plus damper plus roller" for flexible linear bearing. The main motion and the micro vibrating motions, as well as the coupling of these motions, can be represented and formulated. The simulations and experiments are conducted to demonstrate the validity of the approach. The results show that the model can represent and explain the dynamic characteristics of the motion system within the wide frequency range up to 1000Hz congruously. The motion control experiments illustrated the expected performance can be achieved.

Original languageEnglish
Title of host publicationProceedings of the 7th World Congress on Intelligent Control and Automation, WCICA'08
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages455-460
Number of pages6
ISBN (Print)9781424421145
DOIs
StatePublished - 2008
Event7th World Congress on Intelligent Control and Automation, WCICA'08 - Chongqing, China
Duration: 25 Jun 2008 → 27 Jun 2008

Publication series

NameProceedings of the World Congress on Intelligent Control and Automation (WCICA)

Conference

Conference7th World Congress on Intelligent Control and Automation, WCICA'08
Country/TerritoryChina
CityChongqing
Period25/06/08 → 27/06/08

Keywords

  • Dynamic modeling
  • Linear motor
  • Motion control
  • Multi-mode vibration coupled motion

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