TY - GEN
T1 - Modeling and control of a piezoelectric-actuated nano-positioner
T2 - 2014 11th World Congress on Intelligent Control and Automation, WCICA 2014
AU - Leng, Tongtong
AU - Yan, Peng
AU - Guo, Lei
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2015/3/2
Y1 - 2015/3/2
N2 - This paper studies the anti-disturbance control for ultra-high precision positioning of a piezoelectric-actuator driven nano-positioner, subjects to nonlinear dynamics and various external disturbances. In this particular study, the multiple-disturbance is supposed to have two parts. One is the undesired vibration resonance, which could be described by an exogenous dynamical system. The other includes model uncertainties and external random disturbances, which can be considered to have bounded norms. The physical model of the nano-positioning stage is discussed and a composite control law is then presented, where disturbance-observer-based control (DOBC) is formulated for feedforward compensation of the vibrations. Then a composite controller consisting of DOBC and an H∞ controller is developed to achieve the anti-disturbance performance. Finally, simulations and experiments on the nanostage are deployed to demonstrate the anti-disturbance performance by combining DOBC with H∞ control.
AB - This paper studies the anti-disturbance control for ultra-high precision positioning of a piezoelectric-actuator driven nano-positioner, subjects to nonlinear dynamics and various external disturbances. In this particular study, the multiple-disturbance is supposed to have two parts. One is the undesired vibration resonance, which could be described by an exogenous dynamical system. The other includes model uncertainties and external random disturbances, which can be considered to have bounded norms. The physical model of the nano-positioning stage is discussed and a composite control law is then presented, where disturbance-observer-based control (DOBC) is formulated for feedforward compensation of the vibrations. Then a composite controller consisting of DOBC and an H∞ controller is developed to achieve the anti-disturbance performance. Finally, simulations and experiments on the nanostage are deployed to demonstrate the anti-disturbance performance by combining DOBC with H∞ control.
KW - Anti-disturbance control
KW - Disturbance-observer-based control
KW - H control
KW - Nano-positioner
UR - https://www.scopus.com/pages/publications/84932183577
U2 - 10.1109/WCICA.2014.7053178
DO - 10.1109/WCICA.2014.7053178
M3 - 会议稿件
AN - SCOPUS:84932183577
T3 - Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
SP - 2836
EP - 2841
BT - Proceeding of the 11th World Congress on Intelligent Control and Automation, WCICA 2014
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 29 June 2014 through 4 July 2014
ER -