Model and open-loop characteristics lest of the silicon resonant pressure microsensor

Based on the analysis of the magnitude and phase frequency characteristics of the resonant silicon microstructure pressure sensor, experiment investigation on the open-loop test of resonant sensors, curve fitting and data processing with Matlab, a model of the resonant silicon microsensor was described. The resonant frequency, quality factor and phase characteristic of the sensor can then be calculated without the influence of the unknown phase delay. The obtained results here are of significance to develop the closedloop system of microsensor.