@inproceedings{fd8188db0b0b44ce95479a261a900145,
title = "Microstructure silicon force sensor and its simulation",
abstract = "This paper introduces an a practical silicon beam resonator attached to an E-type round diaphragm, which is used for measuring the concentrated force. Working principle of this sensor in introduced and relationship between the basic neutral frequency of the beam resonator and the concentrated force are analyzed and investigated. FEM (Finite Element Method) simulation is used to simulate the vibration features of the above beam resonant and the microsensor. Finally, based on the differential output mean, a set of optimum parameters of the above sensing unit is determined.",
keywords = "Beams, Concentrated force, FEM, frequency",
author = "Mohamed, \{Ali El Mahdi\} and Shangchun Fan and Zhanshe Guo",
year = "2008",
doi = "10.1117/12.806327",
language = "英语",
isbn = "9780819473615",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Seventh International Symposium on Instrumentation and Control Technology",
note = "7th International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence ; Conference date: 10-10-2008 Through 13-10-2008",
}