Microstructure and properties of multilayer ZrO₂/Cr₂O₃ nanocomposite films depending on the energy of incident ions

The application of negative substrate bias and thus the energy of ions during physical vapor deposition can significantly regulate the morphology, structure and properties of the films. In this study, ZrO₂/Cr₂O₃ nanocomposite films were prepared via physical vapor deposition on 316 L stainless steel with different bias voltages. The morphology, elemental composition, structure evolution, mechanical properties and tribological behaviors of the films were investigated, and they were scientifically characterized by SEM, EDS, XRD, nano-indentation, scratch tester and friction tester. Result shows that the transition from columnar crystals to refined grains and nanocrystals was observed with the increasing of bias and ionic energy. The load carrying capacity and toughness of the films are promoted by the high energy ions, resulting in the enhanced tribological properties. The compact structure and friction film significantly improve the anti-friction and wear properties of the film prepared with −150 V bias voltage.