Microlenses fabricated by discontinuous dewetting and soft lithography

Xinhong Yu; Zhe Wang; Yanchun Han

doi:10.1016/j.mee.2008.06.001

Microlenses fabricated by discontinuous dewetting and soft lithography

Xinhong Yu
, Zhe Wang
, Yanchun Han^*

^*Corresponding author for this work

CAS - Changchun Institute of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

This letter describes an approach to fabricating microlens arrays with low cost and large area through the combination of discontinuous dewetting and reversible water-ice transition via a soft lithography replica process. Microlenses with different curvature can be tuned by the modulation of the wettability of the substrates. The microlenses fabricated can project clear miniaturized images.

Original language	English
Pages (from-to)	1878-1881
Number of pages	4
Journal	Microelectronic Engineering
Volume	85
Issue number	9
DOIs	https://doi.org/10.1016/j.mee.2008.06.001
State	Published - Sep 2008
Externally published	Yes

Keywords

Microlens
Soft lithography

Access to Document

10.1016/j.mee.2008.06.001

Cite this

@article{0d20c379a2a6495a820d8138a06267f8,

title = "Microlenses fabricated by discontinuous dewetting and soft lithography",

abstract = "This letter describes an approach to fabricating microlens arrays with low cost and large area through the combination of discontinuous dewetting and reversible water-ice transition via a soft lithography replica process. Microlenses with different curvature can be tuned by the modulation of the wettability of the substrates. The microlenses fabricated can project clear miniaturized images.",

keywords = "Microlens, Soft lithography",

author = "Xinhong Yu and Zhe Wang and Yanchun Han",

year = "2008",

month = sep,

doi = "10.1016/j.mee.2008.06.001",

language = "英语",

volume = "85",

pages = "1878--1881",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "9",

}

TY - JOUR

T1 - Microlenses fabricated by discontinuous dewetting and soft lithography

AU - Yu, Xinhong

AU - Wang, Zhe

AU - Han, Yanchun

PY - 2008/9

Y1 - 2008/9

N2 - This letter describes an approach to fabricating microlens arrays with low cost and large area through the combination of discontinuous dewetting and reversible water-ice transition via a soft lithography replica process. Microlenses with different curvature can be tuned by the modulation of the wettability of the substrates. The microlenses fabricated can project clear miniaturized images.

AB - This letter describes an approach to fabricating microlens arrays with low cost and large area through the combination of discontinuous dewetting and reversible water-ice transition via a soft lithography replica process. Microlenses with different curvature can be tuned by the modulation of the wettability of the substrates. The microlenses fabricated can project clear miniaturized images.

KW - Microlens

KW - Soft lithography

UR - https://www.scopus.com/pages/publications/49749143347

U2 - 10.1016/j.mee.2008.06.001

DO - 10.1016/j.mee.2008.06.001

M3 - 文章

AN - SCOPUS:49749143347

SN - 0167-9317

VL - 85

SP - 1878

EP - 1881

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 9

ER -

Microlenses fabricated by discontinuous dewetting and soft lithography

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this