Microforming of MEMS parts with amorphous alloys

Microformability of new amorphous alloys in the supercooled liquid state and microforming techniques for the materials are shown. In the supercooled liquid state, the materials reveal perfect Newtonian viscous flow characteristics and furthermore exhibit an excellent property of microformability on a submicron scale. As for microforming techniques, microforging and micro extrusion of amorphous alloys are introduced in addition to the fabrication method of micro dies of photochemically machinable glass. As a result, amorphous alloys are expected as one of the most useful materials to fabricate micromachines.