MEMS rectangular waveguide filter at 140 GHz

Xing Hai Zhao; Guang Cun Shan; Ying Bin Zheng; Yi Jia Du; Ying Hui Chen; Jing Fu Bao; Wei Su

doi:10.3724/SP.J.1010.2013.00165

MEMS rectangular waveguide filter at 140 GHz

Xing Hai Zhao^*
, Guang Cun Shan
, Ying Bin Zheng
, Yi Jia Du
, Ying Hui Chen
, Jing Fu Bao
, Wei Su

^*Corresponding author for this work

China Academy of Engineering Physics
City University of Hong Kong
University of Electronic Science and Technology of China

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.

Original language	English
Pages (from-to)	165-169
Number of pages	5
Journal	Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume	32
Issue number	2
DOIs	https://doi.org/10.3724/SP.J.1010.2013.00165
State	Published - Apr 2013
Externally published	Yes

Keywords

DRIE
THz
Waveguide filter

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10.3724/SP.J.1010.2013.00165

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@article{b85b854da56543c898f55166d9e882c4,

title = "MEMS rectangular waveguide filter at 140 GHz",

abstract = "The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.",

keywords = "DRIE, THz, Waveguide filter",

author = "Zhao, \{Xing Hai\} and Shan, \{Guang Cun\} and Zheng, \{Ying Bin\} and Du, \{Yi Jia\} and Chen, \{Ying Hui\} and Bao, \{Jing Fu\} and Wei Su",

year = "2013",

month = apr,

doi = "10.3724/SP.J.1010.2013.00165",

language = "英语",

volume = "32",

pages = "165--169",

journal = "Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves",

issn = "1001-9014",

publisher = "Chinese Optical Society",

number = "2",

}

TY - JOUR

T1 - MEMS rectangular waveguide filter at 140 GHz

AU - Zhao, Xing Hai

AU - Shan, Guang Cun

AU - Zheng, Ying Bin

AU - Du, Yi Jia

AU - Chen, Ying Hui

AU - Bao, Jing Fu

AU - Su, Wei

PY - 2013/4

Y1 - 2013/4

N2 - The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.

AB - The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.

KW - DRIE

KW - THz

KW - Waveguide filter

UR - https://www.scopus.com/pages/publications/84877647789

U2 - 10.3724/SP.J.1010.2013.00165

DO - 10.3724/SP.J.1010.2013.00165

M3 - 文章

AN - SCOPUS:84877647789

SN - 1001-9014

VL - 32

SP - 165

EP - 169

JO - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

JF - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

IS - 2

ER -

MEMS rectangular waveguide filter at 140 GHz

Abstract

Keywords

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