Measurement for both vibration and deformation of micro-surface by Fizeau interferometer of composite self-focus rod sensor

Hai Ming; Xiaohong Sun; Ming Bai; Zhongcheng Liang; Guoping Zhang; Hui Li; Yunxia Wu; Jianping Xie

doi:10.1117/12.318154

Measurement for both vibration and deformation of micro-surface by Fizeau interferometer of composite self-focus rod sensor

Hai Ming^*
, Xiaohong Sun
, Ming Bai
, Zhongcheng Liang
, Guoping Zhang
, Hui Li
, Yunxia Wu
, Jianping Xie

^*Corresponding author for this work

University of Science and Technology of China

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

By using composite self-focus rod, LD-pumped frequency doubling Nd:YVO₄ laser and 3-D fine regulation stand, a new Fizeau-type interferometer is developed. It can apply to measuring the micro-vibration and deformation of micro-surface at the same time. The theoretical analysis and the experimental results for the interferometer of self-focus sensor are given.

Original language	English
Pages (from-to)	169-173
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3555
DOIs	https://doi.org/10.1117/12.318154
State	Published - 1998
Externally published	Yes
Event	Optical and Fiber Optic Sensor Systems - Beijing, China Duration: 16 Sep 1998 → 19 Sep 1998

Keywords

Deformation
Fizeau interferometer
Self-focus rod
Vibration

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10.1117/12.318154

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@article{01505c9ced2347d3a2a30deeb844fd5d,

title = "Measurement for both vibration and deformation of micro-surface by Fizeau interferometer of composite self-focus rod sensor",

abstract = "By using composite self-focus rod, LD-pumped frequency doubling Nd:YVO4 laser and 3-D fine regulation stand, a new Fizeau-type interferometer is developed. It can apply to measuring the micro-vibration and deformation of micro-surface at the same time. The theoretical analysis and the experimental results for the interferometer of self-focus sensor are given.",

keywords = "Deformation, Fizeau interferometer, Self-focus rod, Vibration",

author = "Hai Ming and Xiaohong Sun and Ming Bai and Zhongcheng Liang and Guoping Zhang and Hui Li and Yunxia Wu and Jianping Xie",

year = "1998",

doi = "10.1117/12.318154",

language = "英语",

volume = "3555",

pages = "169--173",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Optical and Fiber Optic Sensor Systems ; Conference date: 16-09-1998 Through 19-09-1998",

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TY - JOUR

T1 - Measurement for both vibration and deformation of micro-surface by Fizeau interferometer of composite self-focus rod sensor

AU - Ming, Hai

AU - Sun, Xiaohong

AU - Bai, Ming

AU - Liang, Zhongcheng

AU - Zhang, Guoping

AU - Li, Hui

AU - Wu, Yunxia

AU - Xie, Jianping

PY - 1998

Y1 - 1998

N2 - By using composite self-focus rod, LD-pumped frequency doubling Nd:YVO4 laser and 3-D fine regulation stand, a new Fizeau-type interferometer is developed. It can apply to measuring the micro-vibration and deformation of micro-surface at the same time. The theoretical analysis and the experimental results for the interferometer of self-focus sensor are given.

AB - By using composite self-focus rod, LD-pumped frequency doubling Nd:YVO4 laser and 3-D fine regulation stand, a new Fizeau-type interferometer is developed. It can apply to measuring the micro-vibration and deformation of micro-surface at the same time. The theoretical analysis and the experimental results for the interferometer of self-focus sensor are given.

KW - Deformation

KW - Fizeau interferometer

KW - Self-focus rod

KW - Vibration

UR - https://www.scopus.com/pages/publications/0032404979

U2 - 10.1117/12.318154

DO - 10.1117/12.318154

M3 - 会议文章

AN - SCOPUS:0032404979

SN - 0277-786X

VL - 3555

SP - 169

EP - 173

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optical and Fiber Optic Sensor Systems

Y2 - 16 September 1998 through 19 September 1998

ER -

Measurement for both vibration and deformation of micro-surface by Fizeau interferometer of composite self-focus rod sensor

Abstract

Keywords

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