TY - GEN
T1 - Lumped Element Model for CMUTs Based Biochemical Resonant Sensor
AU - Zhao, Yihe
AU - Zhao, Libo
AU - Li, Zhikang
AU - Li, Jie
AU - Xu, Tingzhong
AU - Guo, Shuaishuai
AU - Liu, Zichen
AU - Luo, Guoxi
AU - Wang, Jiuhong
AU - Li, Jing
AU - Zhou, Xiangyang
AU - Wang, Hongyan
AU - Wu, Yongshun
AU - Zhao, Yulong
AU - Jiang, Zhuangde
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/6
Y1 - 2019/6
N2 - Lumped element model (LEM) for resonant chemical sensors based on the capacitive micromachined ultrasonic transducers (CMUTs) was developed and analyzed with electrical characterization. The CMUTs chip were functionalized with the electrospinning technology. Two Butterworth Van-Dyke (BvD) models for functionalized CMUTs were proposed and analyzed with different DC voltages. Considering the electrical phase with parasitic capacitance, the modified BvD model can be used to illustrate more comprehensive features for both mechanical impedance and phase properties. The parallel capacitance was measured accurately using an impedance analyzer, and the quality factor was calculated based on the proposed model under different DC voltages. These models will provide important theoretical basis for CMUTs-based chemical sensors to further electrical analysis and oscillator design.
AB - Lumped element model (LEM) for resonant chemical sensors based on the capacitive micromachined ultrasonic transducers (CMUTs) was developed and analyzed with electrical characterization. The CMUTs chip were functionalized with the electrospinning technology. Two Butterworth Van-Dyke (BvD) models for functionalized CMUTs were proposed and analyzed with different DC voltages. Considering the electrical phase with parasitic capacitance, the modified BvD model can be used to illustrate more comprehensive features for both mechanical impedance and phase properties. The parallel capacitance was measured accurately using an impedance analyzer, and the quality factor was calculated based on the proposed model under different DC voltages. These models will provide important theoretical basis for CMUTs-based chemical sensors to further electrical analysis and oscillator design.
KW - Butterworth Van-Dyke model
KW - Capacitive micromachined ultrasonic transducers
KW - electrical analysis
KW - lumped element model
KW - resonant chemical sensor
UR - https://www.scopus.com/pages/publications/85071916664
U2 - 10.1109/TRANSDUCERS.2019.8808692
DO - 10.1109/TRANSDUCERS.2019.8808692
M3 - 会议稿件
AN - SCOPUS:85071916664
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 1191
EP - 1194
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Y2 - 23 June 2019 through 27 June 2019
ER -