Abstract
A novel InP-based micromechanied tunable photodetector with the structure of OMITMC (One-Mrror-Inclined Three-Mirror-Cavity)is presented. The tuning characteristic of the device is analysed in the way of electrical actuation. Through simulation of the filter transmission spectra and the quantum efficiency, the characteristics of high tunability, narrow bandwidth and high quantum efficiency are analysed As a result, the photodetector is tuned with 30nm,with a quantum efficiency of 59% and a linewidth of 1.2nm, when actuated by 10 volts.
| Original language | English |
|---|---|
| Article number | 602022 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 6020 |
| DOIs | |
| State | Published - 2005 |
| Externally published | Yes |
| Event | Optoelectronic Materials and Devices for Optical Communications - Shanghai, China Duration: 7 Nov 2005 → 10 Nov 2005 |
Keywords
- Micromachined
- Photodetector
- Tunable
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