Laser etching of groove structures with micro-optical fiber-enhanced irradiation

Dameng Liu; Jiachen Liu; Hui Wang; Tianmin Shao

doi:10.1186/1556-276X-7-318

Laser etching of groove structures with micro-optical fiber-enhanced irradiation

Dameng Liu^*
, Jiachen Liu
, Hui Wang
, Tianmin Shao

^*Corresponding author for this work

Tsinghua University

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.

Original language	English
Article number	318
Journal	Nanoscale Research Letters
Volume	7
DOIs	https://doi.org/10.1186/1556-276X-7-318
State	Published - 2012
Externally published	Yes

Keywords

Laser
Micro-fabrication
Micro-fiber

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10.1186/1556-276X-7-318

Cite this

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title = "Laser etching of groove structures with micro-optical fiber-enhanced irradiation",

abstract = "A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.",

keywords = "Laser, Micro-fabrication, Micro-fiber",

author = "Dameng Liu and Jiachen Liu and Hui Wang and Tianmin Shao",

year = "2012",

doi = "10.1186/1556-276X-7-318",

language = "英语",

volume = "7",

journal = "Nanoscale Research Letters",

issn = "1931-7573",

publisher = "Springer New York",

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TY - JOUR

T1 - Laser etching of groove structures with micro-optical fiber-enhanced irradiation

AU - Liu, Dameng

AU - Liu, Jiachen

AU - Wang, Hui

AU - Shao, Tianmin

PY - 2012

Y1 - 2012

N2 - A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.

AB - A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.

KW - Laser

KW - Micro-fabrication

KW - Micro-fiber

UR - https://www.scopus.com/pages/publications/84864006290

U2 - 10.1186/1556-276X-7-318

DO - 10.1186/1556-276X-7-318

M3 - 文章

AN - SCOPUS:84864006290

SN - 1931-7573

VL - 7

JO - Nanoscale Research Letters

JF - Nanoscale Research Letters

M1 - 318

ER -

Laser etching of groove structures with micro-optical fiber-enhanced irradiation

Abstract

Keywords

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